Suppression of Vibration Induced by Reciprocal Motion of Displacer in Cryopump with an Active Dynamic Vibration Absorber

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ژورنال

عنوان ژورنال: IFAC-PapersOnLine

سال: 2019

ISSN: 2405-8963

DOI: 10.1016/j.ifacol.2019.11.730